- Title
- A pendulum-like structure for design of oscillators
- Creator
- Chenniappan, Venkatesh; Moheimani, Reza; Yuce, Mehmet
- Relation
- International Conference on Materials for Advanced Technologies, 2009 (ICMAT 2009). Advanced Materials Research, Volume 74 (Singapore 28 June - 3 July, 2009) p. 207-210
- Publisher Link
- http://dx.doi.org/10.4028/www.scientific.net/AMR.74.207
- Publisher
- Trans Tech Publications
- Resource Type
- conference paper
- Date
- 2009
- Description
- A novel MEMS resonator employing “capacitance-shaping” principle to generate sinusoidal signals is proposed. FEM simulations are done to study the structure. Preliminary characterizations on devices fabricated through SOI-MUMPS are carried-out to study the frequency tuning of the resonator by electrostatic actuation. Variants of the proposed structure are presented. Second order dynamical models of the devices are derived.
- Subject
- MEMS; resonators; oscillators; nonlinearity; capacitance-shaping
- Identifier
- http://hdl.handle.net/1959.13/919368
- Identifier
- uon:8846
- Identifier
- ISBN:1022-6680
- Language
- eng
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